1

Dependence of microstructure of TiN coatings on their thickness

Year:
1988
Language:
english
File:
PDF, 431 KB
english, 1988
3

X-ray analysis of heat-treated titanium nitride films

Year:
1989
Language:
english
File:
PDF, 505 KB
english, 1989
4

ε-Ti2N phase growth control in titanium nitride films

Year:
1989
Language:
english
File:
PDF, 129 KB
english, 1989
10

Influence of deposition rate on properties of reactively sputtered TiNx films

Year:
1988
Language:
english
File:
PDF, 239 KB
english, 1988
11

Ion-assisted sputtering of TiN films

Year:
1990
Language:
english
File:
PDF, 534 KB
english, 1990